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Protos Carrier MA Series
Part Number |
MA-5 (5inch carrier) |
Feature |
Double-wall construction provides excellent impact resistance while wafers are firmly protected inside. |
Can be used by automatic wafer loading equipment (robots). |
|
A 3.5 inch floppy disk for data can be stored under the lid. (8 inches only) |
|
The lid and body are supplied as a set, which opens and closes by turning the lid. |
|
Partial filling acceptable. |
|
Surface Resistance |
<1.0×106Ω |
Material |
Conductive Polypropylene |
Specification
Part Number |
Wafer Diameter |
H(mm) |
h(mm) |
D(mm) |
A(mm) |
MA-5 |
5 inch |
90 |
50 |
128±1 |
150 |
MA-6 |
6 inch |
90 |
50 |
153±1 |
175 |
MA-6S |
6 inch slim |
63 |
38 |
153±1 |
175 |
MA-8 |
8 inch |
103 |
54 |
203±1 |
226 |
MA-8S |
8 inch slim |
65 |
38 |
203±1 |
226 |
MA-12 |
12 inch |
76 |
44 |
302±1 |
328 |