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Protos Spacer
Achilles has developped the spacer securely protecting silicon wafers during transportaion, taking advantage of both Achilles's clean technology and special processing technology.
PEA Type
Part Name |
Protos Spacer PEA Type |
Part Number |
PEA-4-350 |
PEA-5-350 |
|
PEA-6-350 |
|
PEA-8-350 |
|
PEA-12-350 |
|
Feature |
This is new type antistatic spacer with low particle counts |
Surface |
< 1.0 x 1012Ω |
Standard |
Sheet thickness: 100um, with height of emboss 350um |
Material |
Anti-static Polyethylene |
CPS Type
Part Name |
Protos Spacer CPS Type |
Part Number |
CPS-4-250 |
CPS-5-250 |
|
CPS-6-250 |
|
CPS-8-250 |
|
CPS-12-250 |
|
Feature |
This is new type conductive spacer with low particle counts and low ion contamination. |
Surface |
< 1.0 x 109Ω |
Standard |
Sheet thickness: 100um, with height of emboss 250mm |
Material |
Conductive Polyethylene |